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Side Drive | Center Drive |
C CR CZ CZR ![]() | A AR AZ AZR ![]() |
N (Standard micrometer head) | F (Hex socket screw pitch 0.5) | B (Feed screw pitch 0.5) J (Feed screw pitch 1.0) | |||||||||
![]() Table size 25 (Stroke ±3.2 mm, min. reading 0.01 mm) Table size 40 to 70 (Stroke ±6.5 mm, min. reading 0.01 mm) Table size 80 (Stroke ±12.5 mm, min. reading 0.01 mm) | ![]() Table size 25 (M3 × P0.5, stroke ±3.2 mm) Table size 40 to 80 (M6 × P0.5, stroke ±6.5 mm) [ ! ] The screw shaft can be locked with a set screw on the bushing. | ![]() Table size 25 (B M3 × P0.5, stroke ±3.2 mm) Table size 40 to 80 (B M6 × P0.5, stroke ±6.5 mm) (J M6 × P1.0, stroke ±6.5 mm) | |||||||||
M (Coarse/fine micrometer head) Table size 40 to 80 (Stroke: coarse feed: ±6.5 mm, fine feed: 0.2 mm) (Min. reading: coarse feed: 10 µm, fine feed: 0.5 µm) | ![]() | D (Digital micrometer head) Table size 80 (Stroke: 0 to 25 mm) (Min. reading: 0.01 mm) (Digital display: 0.001 mm) | [ ! ] Ratchet function is not available.![]() | ||||||||
S (Standard) | H (Disc clamp) | P (Opposed clamp) | ||||||||||||
![]() The stage side surface is held with a clamp plate by tightening the clamp screw. |
on the stage surface. Better position holding performance than the standard clamping method. | ![]() | ![]() The side drive micrometer head is braced from the opposite side by a screw (M4 × 25, pitch 0.5). Improves vibration resistance and has secure position holding performance. |
Item | Condition | Unit | Measurement Method | G (Standard) | R (Clean env. compatible) | |||
Guide Mechanism Surface | Drive Component | |||||||
Grease Performance | Thickener | — | — | — | Lithium soap-based | Urea-based | Lithium soap-based | |
Base Oil | — | — | — | Mineral Oil | Mineral oil (mixture) | Fine Synthetic Oil | ||
Base Oil Kinetic Viscosity | 40°C | mm2/s | JIS K2220 5.19 | 131 | — | 100 | ||
100°C | 12.2 | — | — | |||||
Worked Penetration | — | — | JIS K2220 7 | 283 | 275 | 315 | ||
Dropping Point | — | °C | JIS K2220 8 | 181°C | 280°C | 220°C | ||
Evaporation Amount | — | wt% | — | 0.24 | 0.26 | 0.7 | ||
Oil Separation | 100°C × 24 hrs | wt% | JIS K2220 5.7 | 2.8 | 0.0 | 2.6 | ||
Low Temperature Torque | (Starting) | -30°C | N⋅m | JIS K2220 514 | — | — | 0.22 | |
(Rotation) | — | — | 0.06 | |||||
Operating Temperature | In Air | °C | — | -25 to 120°C | -15 to 150°C | -40 to 120°C |
NG | OK |
![]() Standard, CR, A | ![]() CZ, CZR Standard CR A, AR |
A load exceeding the spring pull force will cause the stage surface to drop. | CZ, CZR: The stage top surface does not drop since load applied to the stage surface can be supported by the micrometer head and the bracket mounted on the bottom plate. Standard, CR, A, AR: The stage does not move down when the micrometer head is mounted with its tip oriented upward. |
Part Number | — | (1) Feed position | — | (2) Feeding method | — | (3) Clamp type | — | (4) Grease |
FSXYR40 | — | C | — | F | — | S | — | R |
Part Number | Used Stage | ||
Type | Axis | Guide | |
FS | X | R | XSG |
C | XPG | ||
XY | R | XYSG | |
Z | R | ZSG |
Stage | (1) Feed position | (2) Feeding method | (3) Clamp type | (4) Grease | |||
Axis | Type | Size | Center/Side | Micrometer Head (stroke: mm) | Feed screw (pitch/stroke: mm) | Selection | Selection |
X-Axis | FSXR (Linear Ball) | 25 | (Center) A AR AZ AZR (side) C CR CZ CZR | N (Standard ±3.2) | F (Hex socket 0.5/±3.2) B (Feed screw 0.5/±3.2) | S (Standard) | G (Standard) R (Clean env. compatible)*2 |
40 | N (Standard ±6.5) M (Coarse/fine feed ±6.5) | F (Hex socket 0.5/±6.5) B (Feed screw 0.5/±6.5) J (Feed screw 1.0/±6.5) | S (Standard) H (Disc) P (Opposed) Applicable to C or CR and the feed type is N or F | ||||
50 | |||||||
60 | |||||||
70 | |||||||
80 | N (Standard ±12.5) M (Coarse/fine feed ±6.5) D (Digital micrometer ±12.5) * 1. Only applicable to feed position A ,AR and C | S (Standard) H (Disc) | |||||
FSXC (Cross Roller) | 25 |
| N (Standard ±3.2) | B (Feed screw 0.5/±3.2) | S (Standard) | G (Standard) | |
40 | N (Standard ±6.5) M (Coarse/fine feed ±6.5) | ||||||
60 | |||||||
80 | N (Standard ±12.5) M (Coarse/fine feed ±6.5) | ||||||
XY-Axis | FSXYR (Linear Ball) | 25 | (Center) A AR (side) C CR | N (Standard ±3.2) | F (Hex socket 0.5/±3.2) B (Feed screw 0.5/±3.2) | S (Standard) | G (Standard) R (Clean env. compatible)*2 |
40 | N (Standard ±6.5) M (Coarse/fine feed ±6.5) | F (Hex socket 0.5/±6.5) B (Feed screw 0.5/±6.5) J (Feed screw 1.0/±6.5) | S (Standard) H (Disk) Only applicable to C, CR P (Opposed) Applicable to C or CR and the feed type is N or F | ||||
50 | |||||||
60 | |||||||
70 | |||||||
80 | N (Standard ±12.5) M (Coarse/fine feed ±6.5) D (Digital micrometer ±12.5) * 1. Only applicable to feed position A and AR | S (Standard) H (Disc) Only applicable to C, CR | |||||
Z-Axis | FSZR (Linear Ball) | 25 | (Center) AZ AZR (side) C CR CZ CZR Feeding direction of C, CR is upward; that of the others is downwards | N (Standard ±3.2) | F (Hex socket 0.5/±3.2) B (Feed screw 0.5/±3.2) | S (Standard) | G (Standard) R (Clean env. compatible)*2 |
40 | N (Standard ±6.5) M (Coarse/fine feed ±6.5) not applicable to C, CR | F (Hex socket 0.5/±6.5) B (Feed screw 0.5/±6.5) J (Feed screw 1.0/±6.5) | S (Standard) H (Disc) P (Opposed) Applicable to C or CR and the feed type is N or F | ||||
50 | |||||||
60 | |||||||
70 | |||||||
80 | N (Standard ±12.5) M (Coarse/fine feed ±6.5) not applicable to C, CR | S (Standard) H (Disc) |
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Part Number | Minimum order quantity | Volume Discount | RoHS | Table Size (Length) L (Range Selectable) (mm) | Table Size (Width) W (Range Selectable) (mm) | Load Capacity (Range Selectable) (N) | Stroke (Distance along X-Axis) (Range Selectable) (mm) | Stroke (Distance along Y-Axis) (Range Selectable) (mm) | Table Material | Table Surface Treatment | Guiding Mechanism | Table Size (Thickness) H (Range Selectable) (mm) | Table Size (Length) L (mm) | Table Size (Width) W (mm) | Horizontal Load Capacity (N) | Stroke (X Distance) (mm) | Stroke (Y Distance) (mm) | Table Size (Thickness) H (mm) | Stroke (Z Distance) (mm) | Table Parallelism (µm) | Moment Rigidity (Pitching) ("/N•cm) | Moment Rigidity (Yawing) ("/N•cm) | Moment Rigidity (Rolling) ("/N•cm) | Feed Knob Position | Reversed | Grease Selection | Clamp Method Selection | Feeding Method Selection | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Center | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Center | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Center | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Side | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Side | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | ≤ 25 | ≤ 25 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 1-15 | 25 | 25 | 9.8 | ±3.2 | - | 15 | - | 30 | 3.03 | 2.85 | 1.80 | Side | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Center | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Center | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Center | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Side | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Side | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 26-40 | 26-40 | 5 to 30 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 40 | 40 | 19.6 | ±6.5 | - | 20 | - | 30 | 0.38 | 0.42 | 0.28 | Side | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Center | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Center | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Center | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Side | Standard | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Side | Right and Left | G (Standard) | Standard [S] | Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 41-60 | 41-60 | 30.1 to 50 | Up to ±10mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 60 | 60 | 49 | ±6.5 | - | 20 | - | 30 | 0.12 | 0.11 | 0.07 | Side | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Center | Standard | G (Standard) | Standard [S] | Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Center | Right and Left | G (Standard) | Standard [S] | Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Center | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Side | Standard | G (Standard) | Standard [S] | Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Side | Right and Left | G (Standard) | Standard [S] | Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N] | ||
1 | 9 Days | 10 | 61-90 | 61-90 | 50.1 to 100 | ±10 to 30mm | - | Aluminum Alloy | Black Anodized Aluminum | Cross Roller | 15.1-20 | 80 | 80 | 98 | ±12.5 | - | 20 | - | 30 | 0.05 | 0.05 | 0.04 | Side | Up/Down | G (Standard) | Standard [S] | Standard Micrometer Head [N] |
Loading...
NG | OK |
![]() Standard, CR, A | ![]() CZ, CZR Standard CR A, AR |
A load exceeding the spring pull force will cause the stage surface to drop. | CZ, CZR: The stage top surface does not drop since load applied to the stage surface can be supported by the micrometer head and the bracket mounted on the bottom plate. Standard, CR, A, AR: The stage does not move down when the micrometer head is mounted with its tip oriented upward. |
Through Hole (Table Center Hole) | Not Provided |
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Configure
Basic Attributes
Table Size (Length) L (Range Selectable)(mm)
Table Size (Width) W (Range Selectable)(mm)
Load Capacity (Range Selectable)(N)
Stroke (Distance along X-Axis) (Range Selectable)(mm)
Stroke (Distance along Y-Axis) (Range Selectable)(mm)
Table Surface Treatment
Guiding Mechanism
Table Size (Thickness) H (Range Selectable)(mm)
Table Size (Length) L(mm)
Table Size (Width) W(mm)
Horizontal Load Capacity(N)
Stroke (X Distance)(mm)
Stroke (Y Distance)(mm)
Table Size (Thickness) H(mm)
Stroke (Z Distance)(mm)
Feed Knob Position
Reversed
Grease Selection
Clamp Method Selection
Feeding Method Selection
Type
Table Material
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Optional Attributes