[Precision] X / Y / Z-Axis Selectable

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(1) Feed position
Side DriveCenter Drive

C

CR

CZ

CZR

[High Precision]XY-axis stages - specification selectable: Related Image

A

AR

AZ

AZR

[High Precision]XY-axis stages - specification selectable: Related Image
(2) Feeding method
N (Standard micrometer head)F (Hex socket screw pitch 0.5)B (Feed screw pitch 0.5)
J (Feed screw pitch 1.0)

Table size 25 (Stroke ±3.2 mm, min. reading 0.01 mm)

Table size 40 to 70 (Stroke ±6.5 mm, min. reading 0.01 mm)

Table size 80 (Stroke ±12.5 mm, min. reading 0.01 mm)

Table size 25 (M3 × P0.5, stroke ±3.2 mm)

Table size 40 to 80 (M6 × P0.5, stroke ±6.5 mm)

[ ! ] The screw shaft can be locked with a set screw on the bushing.

Table size 25 (B M3 × P0.5, stroke ±3.2 mm)

Table size 40 to 80 (B M6 × P0.5, stroke ±6.5 mm)

(J M6 × P1.0, stroke ±6.5 mm)

M (Coarse/fine micrometer head)
Table size 40 to 80
(Stroke: coarse feed: ±6.5 mm, fine feed: 0.2 mm)
(Min. reading: coarse feed: 10 µm, fine feed: 0.5 µm)
D (Digital micrometer head)
Table size 80
(Stroke: 0 to 25 mm)
(Min. reading: 0.01 mm)
(Digital display: 0.001 mm)
[ ! ] Ratchet function is not available.
(3) Clamp type
S (Standard)
H (Disc clamp)
P (Opposed clamp)

The stage side surface is held with a clamp plate
by tightening the clamp screw.
Guide
Method
AJ1P1
Linear
Ball
40·50·60·7015.810
8014.815
A disc clamping method that does not apply loads
on the stage surface.
Better position holding performance
than the standard clamping method.

The side drive micrometer head is braced from the opposite side
by a screw (M4 × 25, pitch 0.5).
Improves vibration resistance and has secure position holding performance.
(4) Grease
ItemConditionUnitMeasurement MethodG (Standard)R (Clean env. compatible)
Guide Mechanism SurfaceDrive Component
Grease PerformanceThickenerLithium soap-basedUrea-basedLithium soap-based
Base OilMineral OilMineral oil (mixture)Fine Synthetic Oil
Base Oil Kinetic Viscosity40°Cmm2/sJIS K2220 5.19131100
100°C12.2
Worked PenetrationJIS K2220 7283275315
Dropping Point°CJIS K2220 8181°C280°C220°C
Evaporation Amountwt%0.240.260.7
Oil Separation100°C × 24 hrswt%JIS K2220 5.72.80.02.6
Low Temperature Torque(Starting)-30°CN⋅mJIS K2220 5140.22
(Rotation)0.06
Operating TemperatureIn Air°C-25 to 120°C-15 to 150°C-40 to 120°C
* The guide mechanism grease for the linear ball guide stages are R (clean environment compatible) by default.
  The only change applicable when the R (clean environment compatible) alteration is specified is the grease for other drive components.
[Grease Change Locations]· Guide mechanism surfaces (slide surfaces, slide contacts, guides) (Micrometer head / feed screw)
"!" One Point:
Differences between X-axis stages (XSG and XPG) used vertically and X-axis stages (ZSG and ZPG)
Assemble Z-axis stages by considering the direction of the micrometer head, feed screw, and spring force to prevent the stage surface from falling under the load. (Center drive is the standard.)
[ ! ] Notes on vertical uses of X-axis stages
The stage surface may drop if mounted vertically with the micrometer head pointing downward with XSG□□ (or -CR / -A selected).
(The stage surface does not drop when mounted with the micrometer head tip pointing upward.)
NGOK

Standard, CR, A

CZ, CZR

Standard

CR

A, AR

A load exceeding the spring pull force
will cause the stage surface to drop.
CZ, CZR: The stage top surface does not drop since load applied to the stage surface can be supported
by the micrometer head and the bracket mounted on the bottom plate.
Standard, CR, A, AR: The stage does not move down when the micrometer head is mounted with its tip oriented upward.
[ ! ] However, do not apply a load exceeding the specified vertical load capacity.

Specification Table

Part Number(1) Feed position(2) Feeding method(3) Clamp type(4) Grease
FSXYR40CFSR
Part NumberUsed
Stage
TypeAxisGuide
FSXRXSG
CXPG
XYRXYSG
ZRZSG
* Refer to the stage with the same size as the table.
Guide R: linear ball
C: cross roller
 
Stage(1) Feed position(2) Feeding method(3) Clamp type(4) Grease
AxisTypeSizeCenter/SideMicrometer Head
(stroke: mm)
Feed screw
(pitch/stroke: mm)
SelectionSelection
X-AxisFSXR
(Linear Ball)
25(Center)
A
AR
AZ
AZR

(side)
C
CR
CZ
CZR
N (Standard ±3.2)F (Hex socket 0.5/±3.2)
B (Feed screw 0.5/±3.2)
S (Standard)G
(Standard)
R
(Clean env. compatible)*2
40N (Standard ±6.5)
M (Coarse/fine feed ±6.5)
F (Hex socket 0.5/±6.5)
B (Feed screw 0.5/±6.5)
J (Feed screw 1.0/±6.5)
S (Standard)
H (Disc)
P (Opposed) Applicable to C or CR
and the feed type is N or F
50
60
70
80N (Standard ±12.5)
M (Coarse/fine feed ±6.5)
D (Digital micrometer ±12.5)
* 1. Only applicable to feed position A ,AR and C
S (Standard)
H (Disc)
FSXC
(Cross Roller)
25




(Center)
A
AR

AZ
(side)
C
CR

CZ
* 3

N (Standard ±3.2)B (Feed screw 0.5/±3.2)S (Standard)G
(Standard)
40N (Standard ±6.5)
M (Coarse/fine feed ±6.5)
60
80N (Standard ±12.5)
M (Coarse/fine feed ±6.5)
XY-AxisFSXYR
(Linear Ball)
25(Center)
A
AR

(side)
C
CR
N (Standard ±3.2)F (Hex socket 0.5/±3.2)
B (Feed screw 0.5/±3.2)
S (Standard)G
(Standard)
R
(Clean env. compatible)*2
40N (Standard ±6.5)
M (Coarse/fine feed ±6.5)
F (Hex socket 0.5/±6.5)
B (Feed screw 0.5/±6.5)
J (Feed screw 1.0/±6.5)
S (Standard)
H (Disk) Only applicable to C, CR
P (Opposed) Applicable to C or CR and
the feed type is N or F
50
60
70
80N (Standard ±12.5)
M (Coarse/fine feed ±6.5) 
D (Digital micrometer ±12.5)
* 1. Only applicable to feed position A and AR
S (Standard)
H (Disc) Only applicable to C, CR
Z-AxisFSZR
(Linear Ball)
25(Center)
AZ
AZR

(side)
C
CR

CZ
CZR


Feeding direction of C, CR is upward;
that of the others is downwards
N (Standard ±3.2)F (Hex socket 0.5/±3.2)
B (Feed screw 0.5/±3.2)
S (Standard)G
(Standard)
R
(Clean env. compatible)*2
40N (Standard ±6.5)
M (Coarse/fine feed ±6.5) not applicable to C, CR
F (Hex socket 0.5/±6.5)
B (Feed screw 0.5/±6.5)
J (Feed screw 1.0/±6.5)
S (Standard)
H (Disc)
P (Opposed) Applicable to C or CR
and the feed type is N or F
50
60
70
80N (Standard ±12.5)
M (Coarse/fine feed ±6.5) not applicable to C, CR
S (Standard)
H (Disc)
* 1. Only clamp position will be changed for digital micrometer A and AR. * 2. When feed type M (coarse/fine feeds) or D (digital micrometer) is selected, grease R (clean env. compatible) is not applicable. * 3. Combination with M, B is not available for cross roller stages AZ and CZ. Combination with B is not available for cross roller stages with table size 80
"!" Knob Cover HDCVR13 (Sold separately): ø13 micrometer knob diameter can be increased by installing the cover.
[!] Extension cover HDEXT13 (Sold separately): Feed knob of ø13 micrometer head and feed screw can be extended.

Part Number:  

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Part Number
FSXC25-A-[B,​N]-S-G
FSXC25-AR-[B,​N]-S-G
FSXC25-AZ-N-S-G
FSXC25-C-[B,​N]-S-G
FSXC25-CR-[B,​N]-S-G
FSXC25-CZ-N-S-G
FSXC40-A-[B,​M,​N]-S-G
FSXC40-AR-[B,​M,​N]-S-G
FSXC40-AZ-N-S-G
FSXC40-C-[B,​M,​N]-S-G
FSXC40-CR-[B,​M,​N]-S-G
FSXC40-CZ-N-S-G
FSXC60-A-[B,​M,​N]-S-G
FSXC60-AR-[B,​M,​N]-S-G
FSXC60-AZ-N-S-G
FSXC60-C-[B,​M,​N]-S-G
FSXC60-CR-[B,​M,​N]-S-G
FSXC60-CZ-N-S-G
FSXC80-A-[M,​N]-S-G
FSXC80-AR-[M,​N]-S-G
FSXC80-AZ-N-S-G
FSXC80-C-[M,​N]-S-G
FSXC80-CR-[M,​N]-S-G
FSXC80-CZ-N-S-G
Part NumberMinimum order quantityVolume Discount
Standard
Shipping Days
?
RoHSTable Size (Length) L (Range Selectable)
(mm)
Table Size (Width) W (Range Selectable)
(mm)
Load Capacity (Range Selectable)
(N)
Stroke (Distance along X-Axis) (Range Selectable)
(mm)
Stroke (Distance along Y-Axis) (Range Selectable)
(mm)
Table Material Table Surface Treatment Guiding Mechanism Table Size (Thickness) H (Range Selectable)
(mm)
Table Size (Length) L
(mm)
Table Size (Width) W
(mm)
Horizontal Load Capacity
(N)
Stroke (X Distance)
(mm)
Stroke (Y Distance)
(mm)
Table Size (Thickness) H
(mm)
Stroke (Z Distance)
(mm)
Table Parallelism
(µm)
Moment Rigidity (Pitching)
("/N•cm)
Moment Rigidity (Yawing)
("/N•cm)
Moment Rigidity (Rolling)
("/N•cm)
Feed Knob Position Reversed Grease Selection Clamp Method Selection Feeding Method Selection
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80CenterStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N]
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80CenterRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N]
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80CenterUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80SideStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N]
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80SideRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Standard Micrometer Head [N]
1 9 Days 10≤ 25≤ 255 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller1-1525259.8±3.2-15-303.032.851.80SideUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28CenterStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28CenterRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28CenterUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28SideStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28SideRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1026-4026-405 to 30Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20404019.6±6.5-20-300.380.420.28SideUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07CenterStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07CenterRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07CenterUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07SideStandardG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07SideRight and LeftG (Standard)Standard [S]Feed Screw Pitch 0.5 [B] / Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1041-6041-6030.1 to 50Up to ±10mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20606049±6.5-20-300.120.110.07SideUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04CenterStandardG (Standard)Standard [S]Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04CenterRight and LeftG (Standard)Standard [S]Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04CenterUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04SideStandardG (Standard)Standard [S]Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04SideRight and LeftG (Standard)Standard [S]Coarse/Fine Micrometer Head [M] / Standard Micrometer Head [N]
1 9 Days 1061-9061-9050.1 to 100±10 to 30mm-Aluminum AlloyBlack Anodized AluminumCross Roller15.1-20808098±12.5-20-300.050.050.04SideUp/DownG (Standard)Standard [S]Standard Micrometer Head [N]

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  1. 1

Specifications/Overview

"!" One Point:
Differences between X-axis stages (XSG and XPG) used vertically and X-axis stages (ZSG and ZPG)
Assemble Z-axis stages by considering the direction of the micrometer head, feed screw, and spring force to prevent the stage surface from falling under the load. (Center drive is the standard.)
[ ! ] Notes on vertical uses of X-axis stages
The stage surface may drop if mounted vertically with the micrometer head pointing downward with XSG□□ (or -CR / -A selected).
(The stage surface does not drop when mounted with the micrometer head tip pointing upward.)
NGOK

Standard, CR, A

CZ, CZR

Standard

CR

A, AR

A load exceeding the spring pull force
will cause the stage surface to drop.
CZ, CZR: The stage top surface does not drop since load applied to the stage surface can be supported
by the micrometer head and the bracket mounted on the bottom plate.
Standard, CR, A, AR: The stage does not move down when the micrometer head is mounted with its tip oriented upward.
[ ! ] However, do not apply a load exceeding the specified vertical load capacity.

Basic information

Through Hole (Table Center Hole) Not Provided

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Tel:+49 69 668173-0 / FAX:+49 69 668173-360