SMC Vacuum Valves（Pipe Port Type：Flange）
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XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.- 2D / 3D CAD data available
Starting from∗ ： 539.39 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- 2D / 3D CAD data available
Starting from∗ ： 922.41 € Min. Shipping Days ： 11 Days *Unit price with basic configuration
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XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal
SMC
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.- 2D / 3D CAD data available
Starting from∗ ： 436.30 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
SMC
A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- 2D / 3D CAD data available
Starting from∗ ： 876.59 € Min. Shipping Days ： 19 Days *Unit price with basic configuration
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XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- 2D / 3D CAD data available
Starting from∗ ： 540.03 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- 2D / 3D CAD data available
Starting from∗ ： 458.57 € Min. Shipping Days ： 24 Days *Unit price with basic configuration
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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)- 2D / 3D CAD data available
Starting from∗ ： 467.70 € Min. Shipping Days ： 17 Days *Unit price with basic configuration
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XLH, High Vacuum Manual Angle Valve, Bellows Seal
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.- 2D / 3D CAD data available
Starting from∗ ： 436.50 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.- 2D / 3D CAD data available
Starting from∗ ： 620.87 € Min. Shipping Days ： 24 Days *Unit price with basic configuration
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| Application |
| Installation method |
| Number of Ports |
| Types of solenoid |
| Switching Type |
| Electromagnetic valve drive type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Nominal Pipe Thread Size |
| Connection tube diameter |
| Flange Type |
| Flange Calls |
| Cv Value |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types | XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal | XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | ||||
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| Starting from∗ | 539.39 € *Unit price with basic configuration | 922.41 € *Unit price with basic configuration | 436.30 € *Unit price with basic configuration | 876.59 € *Unit price with basic configuration | 540.03 € *Unit price with basic configuration | 458.57 € *Unit price with basic configuration | 467.70 € *Unit price with basic configuration | 436.50 € *Unit price with basic configuration | 620.87 € *Unit price with basic configuration |
| Min. Shipping Days ： | 4 Days | 11 Days | 4 Days | 19 Days | 4 Days | 24 Days | 17 Days | 4 Days | 24 Days |
| Type | Vacuum operation vacuum valves | Pilot Vacuum Valve | Vacuum operation vacuum valves | Vacuum operation vacuum valves | Manual vacuum valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Manual vacuum valve | Pilot Vacuum Valve |
| Application | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating | Single Item Operating |
| Installation method | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-port valve | 2-port valve | 3-port valve | 2-port valve | 2-port valve | 2-port valve | 2-port valve | 2-port valve | 2-port valve |
| Types of solenoid | - | - | Single | - | - | - | - | - | - |
| Switching Type | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed | 2-position Normally Closed |
| Electromagnetic valve drive type | - | - | - | - | - | - | - | - | - |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - | - |
| Pipe Port Type | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange |
| Nominal Pipe Thread Size | - | - | - | - | - | - | - | - | - |
| Connection tube diameter | - | - | - | - | - | - | - | - | - |
| Flange Type | NW / Other | KF / CF | NW / Other | KF | KF / CF | KF | KF | KF | KF |
| Flange Calls | 16 / 25 / 40 / 50 / 63 | 25 / 40 / 50 | 16 / 25 / 40 / 63 | 25 / 40 | 16 / 25 / 40 / 50 | 16 | 25 | 16 / 25 | 25 |
| Cv Value | - | - | - | - | - | - | - | - | - |
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual vacuum valve
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- Vacuum operation vacuum valves
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Application
- Single Item Operating
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Installation method
- Direct
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Number of Ports
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Types of solenoid
- Single
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Switching Type
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Electromagnetic valve drive type
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Effective Sectional Area(mm2)
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Pipe Port Type
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Nominal Pipe Thread Size
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Connection tube diameter
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Flange Type
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Flange Calls
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Cv Value
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